Optomechanical Resonator fabrication

Nano Fabrication

LASSO is designing compact optomechanical sensors for use in several projects, such as the space geodesy and inertial sensing initiatives. These types of sensors can be costly. Our group is currently working to fabricate monolithic mechanical sensors using the facilities available at AggieFab Fabrication Facility at TAMU. We are in the early stages of the fabrication process and trying to optimize the process with low loss materials. Sensor fabrication is being tested using Si wafers, masked photolithography, and Cryogenic etch. These sensors will be used in future accelerometer tests and may be expanded to the LIGO project.